本司有各类电子束真空镀膜,磁控溅射台,连续镀等PVD镀膜工艺,支持12英寸以内晶圆或大规格非标衬底。
膜层类别 |
名称 |
镀膜方式 |
备注 |
||
金属 |
|
电子束蒸发 |
磁控溅射 |
热阻蒸发 |
|
Au |
√ |
√ |
√ |
|
|
Ag |
√ |
√ |
√ |
|
|
Al |
√ |
√ |
× |
|
|
Cr |
√ |
√ |
× |
|
|
Cu |
√ |
√ |
√ |
|
|
Ti |
× |
√ |
× |
|
|
Ni |
× |
√ |
× |
|
|
W |
× |
√ |
× |
|
|
Pt |
√ |
√ |
× |
|
|
Sn |
× |
√ |
× |
|
|
Mo |
× |
√ |
× |
|
|
Zr |
× |
√ |
× |
|
|
ln |
× |
√ |
√ |
|
|
非金属 |
C |
× |
√ |
× |
|
合金 |
AlTi |
× |
√ |
× |
|
NiCr |
× |
√ |
× |
97:3 |
|
NiSi |
× |
√ |
× |
90:10 |
|
NiCu |
× |
√ |
× |
55:45 |
|
SiAl |
× |
√ |
× |
|
|
ALMgSi |
× |
√ |
× |
|
|
TiW |
× |
√ |
× |
|
|
TiOx |
× |
√ |
× |
|
|
Y2O2 |
× |
√ |
× |
|
|
AuSn |
× |
√ |
× |
|
|
AgSn |
× |
√ |
× |
|
|
MoS2 |
× |
√ |
× |
|
|
WC |
× |
√ |
× |
|
|
陶瓷 |
AZO |
× |
√ |
× |
|
TiN |
√ |
√ |
× |
|
|
Zns |
× |
√ |
× |
|
|
NTO |
× |
√ |
× |
|
|
MoO |
× |
√ |
× |
|
|
SiO2 |
× |
√ |
× |
|
|
Al2O3 |
× |
√ |
× |
|
|
Nb2O5 |
× |
√ |
× |
|
|
Nb2O5Cr |
× |
√ |
× |
|
|
Nb2O5Al |
× |
√ |
× |
|
|
ATO |
× |
√ |
× |
|
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